Not known Facts About Noohapou
Not known Facts About Noohapou
Blog Article
The POU3500 technique delivers dynamic temperature Charge of the procedure chamber cathode / electrode / anode and can be synchronized with any etch process.
thirty% of its peak electrical power use, featuring our prospects sizeable reduction in working expenses and elevated trustworthiness.
The information down below is classified click here by semiconductor system and tool maker. Every single table incorporates an Applications Matrix that exhibits qulified and professional procedures.
Originally Established in 1985, our business has grown into a regarded chief in offering temperature Command systems to the global semiconductor field.
This impressive procedure, providing a small type element, affordable-of-Ownership and Dynamic Temperature Regulate made available course of action and products engineers a new Resource to optimize their temperature sensitive processes.
The accuracy of the POU 3300 permits impartial control of the process fluid temperature for the wafer chuck within +/- 0.1 °C of set point, as well as quick reaction time of the technique will allow for maximum wafer-to-wafer repeatability all over the etch procedure.
The accuracy in the POU 3500 permits independent Charge of the method fluid temperature towards the wafer chuck within just +/- 0.1 °C of established level, along with the rapid response time of your program lets for optimum wafer-to-wafer repeatability all through the etch method.
With our unit strategically mounted close to six toes within the chamber, we achieve a way more exact examining in the chuck temperature. This method ensures steady temperature throughout the generation whole lot, bringing about improved wafer-to-wafer CD uniformity.
the information pertains to some 300mm chamber temperature profile in the course of a significant part ratio Etch course of action, running at really high RF power situations (~three.8kW). The powerful aspects of this facts set are:
Dynamic Temperature Handle, as executed in devices similar to the LAUDA-Noah POU, is really an approach that senses the temperature of the method fluid returning from the process chamber’s wafer chuck (ESC) and dynamically adjusts the temperature with the supplied procedure fluid dependant on this serious-time opinions.
The TEs' can swap straight from heating to cooling, or visa-versa. they might switch on & off even though from the heating or cooling manner and will improve or decrease the level of heating or cooling with no switching whatsoever.
over at any time, shrinking machine geometries, demanding new procedures along with a hugely competitive ecosystem involve temperature Command units that combine rapid and correct temperature Handle with an emphasis on lessened functioning expenses and improved reliability.
Confirmed; TEs' stand for just one part of a chiller's design and style. The switching & control techniques used by a chiller will affect the TEs' dependability.
viewing free movies on the web is a effortless and frugal technique to begin to see the movies you love appropriate in the comfort and ease of your own private house.
We understand that excellent products tend to be the results of excellent client suggestions and the appliance of ground breaking technology. We strive to make benefit for our buyers via a method that allows the customer impact our objectives, goals, product or service developments and organization methods.
Report this page